Optical Microscopy
Please note that our equipment is dedicated to cleanroom processing only. For the use of optical microscopes not requiring a cleanroom environment, please contact the Scientific Center for Optical and Electron Microscopy.
Responsibility:
Analysis room
- Episcopic-/diascopic illuminated optical microscope
- Motorized revolver with 5x, 10x, 20x, 50x, 100x, 150x plan objectives
- 10x oculars
- Magnification 50-1500x
- Motorized final aperture
- Focus target
- Dark/Bright-field imaging
- Polarizer/analyzer, Normarski prism
- Several optical filters
- Nikon Coolpix 990 Camera
- HP Photo printer
Photolithography Room
- Episcopic-/diascopic illuminated optical microscope
- Motorized revolver with 5x, 10x, 20x, 50x, 100x plan objectives
- 10x oculars
- Magnification 50-1000x
- Motorized final aperture
- Focus target
- Dark/Bright-field imaging
- Polarizer/analyzer
- Normarski prism
- Several optical filters
- Interference contrast
- Several optical filters
SEM Room
- Episcopic-/diascopic illumination
- Confocal and ring lighting on heads
- Fully integrated (FI) head with CMOS sensor and HDR option
- Magnfication 20x-6000x across 4 zoom objectives
- Motorised stage in x, y and z
- Stage motion to cover 100 mm wafer
- Autofocus
- Automated stitching and depth composition modes
- Optical shadow effect mode for detection of edges
- Tiltable head for image acquisition under angle
- 4K screen