Spectroscopic Ellipsometry

Please take part in the survey for the specification of a new ellipsometer. The survey will be open until November 24th, 2024.

Responsibility:

SENTECH SE850 Ellipsometer

350 - 850 nm wavelength range
Microspot
Determination of delta and psi of thin layers
Software to fit refractive index and thickness based on model functions available for standard semiconductor materials, dielectrics and photo resists

Basic knowledge in optics and on the optical properties of materials are required. Otherwise, please visit the following course: Semiconductor Materials: Characterization, Processes & Devices.

Please always provide information on materials and sample structure with your request for a training.