Spectroscopic Ellipsometry

SENTECH SE850 Ellipsometer

• 350 - 850 nm wavelength range
• Microspot
• Determination of delta and psi of thin layers
• Software to fit refractive index and thickness based on model functions available for standard semiconductor materials, dielectrics and photo resists
  

Basic knowledge in optics and on the optical properties of materials are required. Otherwise, please visit the following course: Semiconductor Materials: Characterization, Processes & Devices.

Please always provide information on materials and sample structure with your request for a training.