Scanning Electron Microscopy (SEM)

• Digital Field Emission Scanning Electron Microscope
• 0.1-30 keV beam energy
• 1 - 1.7 nm resolution
• ZEISS Complete Detection System with ET, Inlens SE, EsB and AsB detectors
• Sample holders for chips, 2” and 4” substrates
• All 5 axes full motorized
• TIFF, BMP and JPG image up to 3072 x 2304 pixel resolution

Zeiss ULTRA plus with integrated charge compensation

• Digital Field Emission Scanning Electron Microscope
• 0.02 - 30 keV beam energy
• 1.7 nm resolution
• ZEISS detection system with Inlens SE, EsB and SE detectors
• Sample holders for chips, 2” and 4” substrates
• All 5 axes fully motorized
• TIFF, BMP and JPG image up to 3072 x 2304 pixel resolution
• AVI – Image capture software for recording of audiovisual interleaves
• Charge compensation: For isolating materials: resist, sapphire, glass, capton etc.
• OptiProbe: Software system to adjust the probe current continuously

Sputter system Pt (EM ACE200)

• Sputter coating of non-conductive SEM samples with Pt, PdAu or Au
  
• Ar plasma
• 3 different targets available: Pt, PdAu or Au
• Samples up to 4” diameter