Homepage
Navigation
Search
Content
Footer
Contact
Sitemap
FIRST - Center for Micro- and Nanoscience
Main Navigation
The Center
The Center
See overview
close
Mission
Organisation
Access
Project submission
Check-In
Check-Out
Operating hours
Visitors
add
Display all
Jobs
How to Find Us
People
People
See overview
close
Coordinator
Operation Team
Technical Team
Administration
Board Members
People A-Z
Alumni
Equipment
Equipment
See overview
close
Research Equipment
Annealing
Atomic Force Microscopy (AFM)
Atomic Layer Deposition (ALD)
Bonding
Capacitance-Voltage Profiling (CV)
Electrical Testing (Probing)
Electron-Beam Evaporation
Electron-Beam Lithography (EBL)
Electroplating of Gold
Hall Effect Measurement
Inductively-Coupled Plasma Etching (ICP)
KOYO oven
Lapping
Laserwriter
Magnetron Sputtering
Maskaligners
Metal-Organic Vapor Phase Epitaxy (MOVPE)
Micromanipulation
Molecular Beam Epitaxy (MBE)
Optical Microscopy
Optical Reflectometry
Photoluminescence Mapping (PLM)
Photoresist Spinning
Plasma-Enhanced Chemical Vapor Deposition (PECVD)
Reactive Ion Etching (RIE)
Scanning Electron Microscopy (SEM)
Spectroscopic Ellipsometry
Surface Profiling
Wafer Cleaning
Wafer Cutting
Wet Etching
X-ray Diffraction (XRD)
add
Display all
Chemicals
Cleanroom infrastructure
IT Services
Safety
Education & Training
Education & Training
See overview
close
Introduction Day
Mentoring
Equipment Training
Lectures
Safety & Health
Research Activities
Research Activities
See overview
close
Projects
Projects in 2024
Projects in 2023
Projects in 2022
Collaborations with Industry
Publications
Publications 2024
Publications 2023
Publications 2022
Publications 2021
Publications 2020
Publications 2019
Publications 2018
Publications 2017
Publications 2016
Publications 2015
Publications 2014
Publications 2013
Publications 2012
Publications 2011
Publications 2010
Publications 2009
Publications 2008
Publications 2007
Publications 2006
Publications 2005
Publications 2004
Publications 2003
Publications 2002
add
Display all
FIRST-CLA
(active)
FIRST-CLA
See overview
close
Access
Equipment
Research Equipment
Research Activities
Projects
People
Operation Team
Administration
Technical Team
Management Team
Search
EN
Departments
ETH Zurich
FIRST
Language Selection
English
You are here
Homepage
chevron_right
FIRST-CLA
chevron_right
…
People
People
Childpage navigation
Operation Team
chevron_right
Administration
chevron_right
Technical Team
chevron_right
Management Team
chevron_right
Related Content
chevron_right
Access
chevron_right
Equipment
chevron_right
Research Activities
chevron_left
FIRST-CLA
JavaScript has been disabled in your browser