FIRST-CLA Cleanroom
FIRST-CLA offers about 250 m2 clean- and grayroom with modern laboratory infrastructure for research and education focused on the fabrication and characterization of predominately silicon and polymer based micro- and nanosystems. Trained researcher and supervised students are exploiting particular equipment as well as performing complex fabrication process flows for their projects.
For access, training and other details, please contact FIRST-CLA operation team.