Press Enter to activate screen reader mode.
Homepage
Navigation
Search
Content
Footer
Contact
Sitemap
FIRST - Center for Micro- and Nanoscience
Main Navigation
Menu
Homepage
News & Events
The Center
People
Equipment
Education & Training
Research Activities
FIRST-CLA
FAQ
Services
Student portal
Alumni association
Staffnet
lock
Login
Search
search
en
Departments
ETH Zurich
chevron_right
FIRST
Language Selection
English
Navigation Area
Sitemap
collapse all
expand all
expand all
add
News & Events
2024
2023
2022
2021
2020
2019
2018
2017
2016
2015
The Center
Mission
Organisation
Access
Project submission
Check-In
Check-Out
Operating hours
Visitors
Jobs
How to Find Us
People
Coordinator
Operation Team
Technical Team
Administration
Board Members
People A-Z
Alumni
Equipment
Research Equipment
Annealing
Atomic Force Microscopy (AFM)
Atomic Layer Deposition (ALD)
Bonding
Capacitance-Voltage Profiling (CV)
Electrical Testing (Probing)
Electron-Beam Evaporation
Electron-Beam Lithography (EBL)
Electroplating of Gold
Hall Effect Measurement
Inductively-Coupled Plasma Etching (ICP)
KOYO oven
Lapping
Laserwriter
Magnetron Sputtering
Maskaligners
Metal-Organic Vapor Phase Epitaxy (MOVPE)
Micromanipulation
Molecular Beam Epitaxy (MBE)
Optical Microscopy
Optical Reflectometry
Photoluminescence Mapping (PLM)
Photoresist Spinning
Plasma-Enhanced Chemical Vapor Deposition (PECVD)
Reactive Ion Etching (RIE)
Scanning Electron Microscopy (SEM)
Spectroscopic Ellipsometry
Stress Measurements
Surface Profiling
Wafer Cleaning
Wafer Cutting
Wet Etching
X-ray Diffraction (XRD)
Chemicals
Cleanroom infrastructure
IT Services
Safety
Education & Training
Introduction Day
Mentoring
Equipment Training
Lectures
Safety & Health
Research Activities
Projects
Projects in 2024
Projects in 2023
Projects in 2022
Collaborations with Industry
Publications
Publications 2024
Publications 2023
Publications 2022
Publications 2021
Publications 2020
Publications 2019
Publications 2018
Publications 2017
Publications 2016
Publications 2015
Publications 2014
Publications 2013
Publications 2012
Publications 2011
Publications 2010
Publications 2009
Publications 2008
Publications 2007
Publications 2006
Publications 2005
Publications 2004
Publications 2003
Publications 2002
FIRST-CLA
Access
Equipment
Research Equipment
Wafer Cutting CLA
Bonding CLA
Lithography CLA
Characterization CLA
Deposition CLA
Plasma Processing, CLA
Wet Processing, CLA
Research Activities
Projects
Projects 2021
Projects 2022
People
Operation Team
Administration
Technical Team
Management Team
FAQ
JavaScript has been disabled in your browser