Wet Etching

Responsibility:

Wet Benches

Wet Chemistry Wetbenches

DI-water guns and taps
N₂ guns
Spin-dryers
40/132kHz ultrasonic baths
Heater/chiller points
Supplies of solvents, acids and bases

HF Wetbench

HF Wetbenches

DI-water gun and tap
N₂ gun
Separate Introduction necessary!

Photolithography wetbench

Lithography Wetbenches

DI-water guns and taps
N₂ guns
40/132kHz ultrasonic baths
Use of HDMS is forbidden.