Surface Profiling
We offer contact surface profiling (Dektak) and non-contact surface profiling (confocal laser scanning microscope) to our users. Please note that our equipment is dedicated to cleanroom processing only. More optical equipment is available in the Scientific Center for Optical and Electron Microscopy.
Responsibilities:
Dektak surface step profiler
Our DektakXT system allows to measure surface profiles by moving a diamond-tipped stylus over the sample surface according to a user-programmed scan length, speed, and stylus force.
- Surface profiler for step height measurements
- Stylus radius 12.5 um und 5 um (Customs tips available upon request)
- Stylus Force 1 to 15 mg with LIS 3 sensor
- Low Force Option with 0.03 to 15 mg
- Vertical range 1 mm
- Vertical resolution 1 nm
- Scan lenght 55 mm (150 mm with stitching)
- Fully motorized
- 3D mapping functionality
Keyence 3D Laser Scanning Microscope VK-X3000
- Confocal laser-scanning microscope with violet laser
- Focus variation and digital microscope functions
- White light interferometry
- Spectral film thickness measurement
- Motorised revolver and stage
- Stitching software