Annealing
Responsibility:
RTA (Rapid Thermal Processor AS-One 100)
- Rapid annealing of metal contacts high temperature processing
- 30 kW IR lamp power
- Sample size up to 3”
- Max. temp. 1100 °C
- Max. rate ~ 20 °C/s
- Vacuum/N2 ambient, H2/N2 ambient possible
- For processes exceeding 30 minutes, please contact the responsible!
Small Anneal Oven (home-made)
- Annealing of metal contacts for Hall-measurements
- Max. sample size 15 x 15 mm2
- Temperature range 50-450 °C
- Vacuum, nitrogen or forming gas atmosphere