Laserwriter
Responsibility:
Heidelberg DWL66+
- Sample sizes from 1 to 20 cm in diameter, 0.2 to 5 mm in thickness
- Exposure wavelength 375 nm (solid-state laser) with up to 70 mW output power
- Write head HiRes: 0.4 µm minimum feature size, writing speed 2 mm2/min
- Write head 10 mm: 1.0 µm minimum feature size, writing speed 110 mm2/min
- Data formats: GDSII, CIF, DXF (not recommended), bitmap, STL, Gerber
- Gray scale exposure possible with 128 steps
- Requirements for use: photolitho experience, for details please see the intro manual