Optical Reflectometry

Metricon 2010/M Prism Coupler

Responsibility:

  1. Ülle-Linda Talts
  2. Silke Schön
Metricon

The Metricon is a prism coupler to measure refractive indices and thicknesses. [1–3]

  • Rapid measurement ≤ 25 s
  • Thickness accuracy ±(0.5 % + 5 nm)
  • Refractive index/birefringence accuracy (±0.0005)
  • For low refractive indices films (≤ 3.5) and of bulk materials
  • Five different wavelengths (405 nm, 520 nm, 635 nm, 980 nm, 1550 nm). No advanced knowledge of optical properties of film/substrate is required.
  • Substrate size: 1 cm square up to 8'' square can be measured.
  • Substrate has to be polished
  • Attention: During the measurement, the sample is in direct contact with the prism over an area of 8 mm diameter.

Possible applications and materials:  

Optical reflectometer (Ocean optics)

Reflectometer

Responsibility:

  1. Silke Schön
  2. Alessandra Sabatti
  • Wavelength range: 270 nm - 1700 nm.
  • Mapping option.
  • Thickness analysis for samples with up to 10 thin films.
  • Sample size: wafers up to 6 inch in diameter.
  • Reference samples: Si, Al.