Deposition CLA

Parylene coater, Diener

• Conformal Parylene C Coatings
• Thickness ~1 um – 20 um
  
• Sample size up to ~ 100 mm
• Deposition pressure down to 10 microbar
• Deposition Temperature at RT or heatable
• Other Parylene types on request

VERA 450 H VTD

- metal thin film deposition by e-​beam evaporation
- optimal layer thickness: 1 – 200 nm
- now available metals: Au, Ti, Cr, Ni
- holder for 4’’ wafer