Deposition CLA

Responsibility:

Parylene Coater, for semiconductoer manufacturing

Parylene coater, Diener

Conformal Parylene C Coatings
Thickness ~1 um – 20 um
Sample size up to ~ 100 mm
Deposition pressure down to 10 microbar
Deposition Temperature at RT or heatable
Other Parylene types on request

Responsibility:

Enlarged view: Sputter coater for sem samples

vacant

Responsibility:

Vacant

e-beam evaporatation tool for thin film production

VERA 450 H VTD

- metal thin film deposition by e-beam evaporation
- optimal layer thickness: 1 – 200 nm
- now available metals: Au, Ti, Cr, Ni
- holder for 4’’ wafer

Responsibility:

Vacant

Electroplating setups including potentiostat/galvanostat and electrochemical tanks and cells for electrodeposition of several types of metals. More information upon consultation: