Deposition room will be closed on Monday, April 24th, 2023.
ICP maintenance on Monday.
Our ICP1 tool in the deposition room will be maintained on Monday, April 24th, 2023. The maintanance process might cause particles. Therefore, the deposition room will be closed on this day from 9 am to 2 pm. We ask all our users to organize their research work in FIRST accordingly. Thank you for your comprehension.