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Molecular Beam Epitaxy (MBE)

Ultra-high vacuum equipment for the epitaxial growth of GaAs-based and InP-based semiconductors for lasers and transistors.

Photoresist Spinning

Spin dispensing of viscous photo resists, polyimides, PMMA etc. with process controller.

Wire Bonding

A method used to fabricate electrical contacts in micro- and nanotechnology on semiconductor devices.

Optical Reflectometry

The Metricon system is a prism coupler to measure refractive indices and thicknesses of thin films with low refractive indices.

Mask Aligners for Contact Printing

Equipment used during photolithography to pattern the surface of a semiconductor device. It uses light to transfer a pattern from a photomask to a light-sensitive chemical photoresist.

Special ETH Communication

Crystal lattice at a distance

An illustration of two crystal lattices with electrons inside in the form of golden spheres

Researchers at ETH Zurich have developed a method that makes it easier to study interactions between electrons in a material. Using a moiré material consisting of twisted atomic layers they created an artificial crystal lattice in a neighbouring material.

07.03.2025

It’s the second round of “Cook the Science”

The three events of the first series were fully booked. Now ETH professor Thomas Michaels is returning with a second series of his cooking show in March, with prestigious guests and scientific explanations for the preparation of food and drinks.

20.02.2025

FIRST Lab Information

FIRST-Lab is an ETH technology platform at the Hönggerberg Campus. We provide a cleanroom for micro- and nanotechnology to enable young scientists performing their research experiments with our state-of-the-art equipment. Our services cover high-level infrastructure support, training and education of users on the equipment, and scientific and technical consulting.

FIRST-Lab is open to all institutes at ETH and to external research laboratories, which require a cleanroom environment for their research work. We are a user lab focusing on the education and training of PhD students and Post Docs. Access permission is granted on project approval. Usage fees will apply.

20.03.2025, 17.04.2025, 22.05.2025, 26.06.2025, 18.09.2025
FIRST Introduction Days.

18.04. - 21.04.2025
Easter Holidays
ETH Zurich will be closed. Night work rules will apply in FIRST.

Dates for CLA Introduction Seminar.

Quick links

We collaborate with the Binnig and Rohrer Nanotechnology Center (BRNC) in Rüschlikon to explore additional equipment and processes.

Cleanroom Facilities

FIRST-Lab provides with its cleanroom about 400 square meters of processing environment with controlled parameters for micro- and nanoscience experiments. Young scientists have the opportunity to work in the field of photo- and nanolithography, to carry out thin film deposition processes, to analyze and characterize their processed samples and to learn about epitaxy of semiconductors.

Access to FIRST

FIRST-Lab is open to all institutes at ETH and to external research laboratories, which require a cleanroom environment for their research work. We are an user lab focusing on the education and training of PhD students and Post Docs.

In order to work within FIRST, a project must be proposed to and approved by the FOT. Larger projects require approval by the FMT.

Frequently asked questions