Metal-Organic Vapor Phase Epitaxy (MOVPE)

AIXTRON AIX 200/4

• Growth of epitaxial III-V compounds on InP and GaAs
• TMIn, TMGa, TMAl group III sources, AsH₃, PH₃, TMSb group V sources SiH₄, DETe n-dopant sources DMZ_n, CBr₄ p-dopant sources
• EpiRAS in situ growth monitoring
• Growth on 2” and 3” substrates