HMDS oven

YES 310TA HMDS Vapor Prime Oven

The system is designed for precise and consistent Hexamethyldisilazane (HMDS) coating. Operating at 125°C, it prepares substrates for improved photoresist adhesion. The system supports batch processing and features programmable vacuum and purge cycles for clean, repeatable results.

• Operating temperature: up to 160°C
• Automated process with programmable vacuum and nitrogen purge cycles
• Contact angle uniformity: ±3 degrees
• Provides moisture-resistant surface modification
• Improves photoresist adhesion
• Capacity: small dies up to 1 cassette of 200 mm wafers.