Archive (before 2015)
2014
03.12.2014: FIRST closed because of MBE chambers maintenance
29.11.2014: FIRST Introduction Day
05.11.2014: FIRST closed because of MBE chambers maintenance
30.10.2014: FIRST Introduction Day
25.09.2014: FIRST Introduction Day
26.08.2014: FIRST Introduction Day
14.08.2014: FIRST closed because of regular service and cleaning day
09.07.2014: FIRST closed because of MBE chambers maintenance
03.07.2014: FIRST Introduction Day
04.06.2014: FIRST closed because of MBE chambers maintenance
22.05.2014: FIRST Introduction Day
10.04.2014: FIRST Introduction Day
06.03.2014: FIRST Introduction Day
06.02.2014: FIRST closed because of regular service and cleaning day
23.01.2014: FIRST Introduction Day
2013
28.11.2013: FIRST Introduction Day
31.10.2013: FIRST Introduction Day
19.09.2013: FIRST Introduction Day
22 & 23.08.2013: FIRST closed because of regular service and cleaning day
15.08.2013: FIRST Introduction Day
25.06.2013: FIRST Introduction Day
28.05.2013: FIRST Introduction Day
23.04.2013: FIRST Introduction Day
26.03.2013: FIRST Introduction Day
26.02.2013: FIRST Introduction Day
29.01.2013: FIRST Introduction Day
2012
11.12.2012: FIRST Introduction Day
30.10.2012: FIRST Introduction Day
25.09.2012: FIRST Introduction Day
23.08.2012: FIRST closed because of regular service day
21.08.2012: FIRST Introduction Day
03.07.2012: FIRST Introduction Day
22.05.2012: FIRST Introduction Day
17.04.2012: FIRST Introduction Day
06.03.2012: FIRST Introduction Day
17.01.2012: FIRST Introduction Day
2011
06.12.2011: FIRST Introduction Day
25.10.2011: FIRST Introduction Day
27.09.2011: FIRST Introduction Day
30.08.2011: FIRST Introduction Day
12.07.2011: FIRST Introduction Day
06.06.2011: ESD-Seminar
24.05.2011: FIRST Introduction Day
05.04.2011: FIRST Introduction Day
01.03.2011: FIRST Introduction Day
18.01.2011: FIRST Introduction Day
2010
07.12.2010: FIRST Introduction Day
26.10.2010: FIRST Introduction Day
28.09.2010, FIRST Introduction Day
17.08.2010, FIRST Introduction Day
29.06.2010, FIRST Introduction Day
30.03.2010, FIRST Introduction Day
12.03.2010, FIRST Chemistry Seminar (english)
11.03.2010, FIRST User Meeting
02.03.2010, FIRST Introduction Day
26.02.2010, FIRST Chemistry Seminar (english)
29.01.2010, FIRST Chemistry Seminar (Cancelled)
15.01.2010, FIRST Chemistry Seminar (english)
19.01.2010, FIRST Introduction Day
2009
01.12.2009, FIRST Introduction Day
22.09.2009, FIRST Introduction Day
30.09 + 1.10.2009, Introduction in new spinner bench and dry ovens
27.10.2009, FIRST Introduction Day
08.09.2009, Cleanroom Model demonstration
28.07.2009, FIRST Introduction Day
16.06.2009, Lithography Seminar, (Cancelled)
16.06.2009, FIRST Introduction Day
28.04.2009, FIRST Introduction Day
31.03.2009, Cleanliness Seminar
25.03.2009, FIRST Introduction Seminar
26.02.2009, Cleanliness Seminar
24.02.2009, FIRST Introduction Seminar
05.02. - 6.2.09 FIRST closed for regular service days
03.02.2009, Cleanliness Seminar
28.01.2009, FIRST Introduction Seminar
2008
18.12.2008, Cleanliness Seminar
10.12.2008, FIRST Introduction Seminar
05.11.2008, FIRST Introduction Seminar
02.10.2008, Cleanliness Seminar
19.08.2008, Cleanliness Seminar
13.08.2008, FIRST Introduction Seminar
24.06.2008, Cleanliness Seminar
18.06.2008, FIRST Introduction Seminar
13.05.2008, Cleanliness Seminar
07.05.2008, FIRST Introduction Seminar
1.4.2008, First Cleanliness Seminar
3.3.2008, First Cleanliness Seminar
10.3.2008, First Cleanliness Seminar
26.3.2008, First Introduction Seminar
27.2.2008, First Introduction Seminar
21.2.2008, Company seminar on photo- and e-beam resists
24.01.2008, Cleanliness Seminar
22.01.2008, Cleanliness Seminar
15.01.2008, FIRST Cleanroom Introduction Seminar
2007
10.12.2007, Cleanliness Seminar
06.11.2007, Cleanliness Seminar
08.11.2007, Hydrofluoric acid – training
30.10.2007, FIRST Cleanroom Introduction Seminar
04.10.2007, Hydrofluoric acid – training
02.10.2007, Cleanliness Seminar
25.09.2007, FIRST Cleanroom Introduction Seminar
30.08.2007, Hydrofluoric acid – training
28.08.2007, Cleanliness Seminar
07.08.2007, FIRST Cleanroom Introduction Seminar
11.07.2007, FIRST Cleanroom Introduction Seminar
20.06.2007, FIRST Cleanroom Introduction Seminar
07.06.2007, FIRST User Seminar
02.05.2007, FIRST Cleanroom Introduction Seminar
14.03.2007, FIRST Cleanroom Introduction Seminar
31.01.2007, FIRST Cleanroom Introduction Seminar
2006
06.12.2006, FIRST Cleanroom Introduction Seminar
01.11.2006, FIRST Cleanroom Introduction Seminar
27.10.2006, FIRST Cleanroom Introduction Seminar
16.08.2006, FIRST Cleanroom Introduction Seminar
05.07.2006, FIRST Cleanroom Introduction Seminar
24.05.2006, FIRST Cleanroom Introduction Seminar
17.05.2006, Electron-beam lithography seminar
01.03.2006, ESD-Seminar (Program as PDF)
25.01.2006, FIRST Cleanroom Introduction Seminar
2005
06.12.2005, FIRST User Meeting
16.11.2005, FIRST Cleanroom Introduction Seminar
23.11.2005, RAITH150 new hardware/software training (Messraum 3)
07.09.2005, FIRST Cleanroom Introduction Seminar
13. + 14.09.05, III/V workshop: on dry etching, plasma deposition, sputtering, MBE, ion beam processing.
06.07.05, FIRST Cleanroom Introduction Seminar
09.06.05, Dr. Arnab Bhattacharya: MOVPE-grown semiconductor nanowires and self-assembled quantum dots
18.05.05, FIRST Cleanroom Introduction Seminar
09.03.05, FIRST Cleanroom Introduction Seminar
26.01.05, FIRST Cleanroom Introduction Seminar
19.01.05, FIRST User Meeting
Closing and Maintenance Dates
20.05.2013: FIRST closed due to public holiday. Night work rules apply
01.05.2013: FIRST closed due to public holiday. Night work rules apply
29.03. - 1.4.2013: FIRST is closed due to Easter holiday. Night work rules apply
07.02.13: FIRST is closed due to service day
22.12.2012 - 02.01.2013: ETH is closed, night work rules apply
04.01.2013 at 5 pm: All equipment should be completely shut down
04.01.2013 at 5 pm - 08.01.2013 at 8 am: FIRST is closed for users.
The following equipment is not available:
- EBL1, EBL2, Sputter tool, Plassys I, MOVPE, XRD Seifert
- running but no support available:
LPCVD, ALD, RIE76, RIE80, PECVD, Univex500, Plassys II
- rest as usual
07.01.2013: There will be a complete power shutdown test
07.01.2013 at 11 am: Equi-Responsibles are allowed to enter (check systems start-up)
10.09.2012: FIRST closed in the afternoon due to public holiday, night work rules will apply in FIRST
01.08.2012: FIRST closed due to public holiday, night work rules will apply in FIRST
28.05.2012: FIRST closed due to public holiday. Night work rules apply
01.05.2012: FIRST closed due to public holiday
16.04.2012: FIRST closed in the afternoon due to "Sechseläuten"
04.04.2012: FIRST closed due to the announced P MBE opening
06.04 - 09.04.2012: FIRST closed due to Easter Holidays
09.02.2012: FIRST closed because of regular service day
18.08.2011: FIRST closed because of regular service day
31.03.2011, 12 am - 1 pm, FIRST closed due to MBE maintenance
15. - 16.03.2011, 8 am - 6 pm, FIRST closed due to MBE maintenance
03. - 04.02.2011, FIRST closed for regular service days
24.12.2010 12:00 AM - 02.01.10: ETH and FIRST closed over Christmas; Night rules apply.
12.08.2010, FIRST closed for regular service day
23.03.2010, 7 am - 10 am & 3 pm - 6 pm, FIRST closed due to MBE maintenance
11.02.2010: FIRST closed for regular service day
24.12.2009 12:00 AM - 03.01.10: ETH and FIRST closed over Christmas
3.11. - 5.11.2009: FIRST closed because mayor maintenance on MBE-system
23.-25.9.2009: Photolithography room closed because new spinner bench will be installed
26.-29.09.2009: Spinner bank and dry ovens not available; only limited working in photolithography room possible
13 & 14.8.2009 FIRST closed for regular service days
24.12.08 - 4.1.2009, ETH Zurich and FIRST closed over Christmas
20. + 21. August 2008: FIRST Closed, regular service days
7.2.08: FIRST closed for regular service day
22.12.07 - 2.1.2008: Reduced service in FIRST, night work rules apply.
17.9.2007: Maintenance on the compressed clean air supply.
5.9.07: No ultra pure water, because of maintenance
22. + 23.8.07: FIRST closed for regular service day
8.2.07: FIRST closed for regular service day
25.12.06 - 2.1.07: First closed over Christmas
24.10.06: FIRST closed for service on LN2
22.8.06: FIRST closed for regular service day
23.2.06: FIRST closed for regular service day
24.12.05 - 2.1.06 First closed over Christmas
25.08.05: FIRST closed for regular service day
23.06.05: No N2 for the whole HCI-Building, only limited working in the lab possible
15.06.05: FIRST closed for service of LN2 (exhaust air down)
31.05.05: USV maintenance (no protection against power failures)
24.02.05: FIRST closed: regular service day
3.2.05: FIRST closed: maintenance gas sensors